The SnFPC @ DSI is part of the extensive research facility in Nanofabrication and Characterisation techniques housed across different Science and Engineering Research Council’s participating Institutes that is made accessible to all researchers from A*STAR, Institutes of Higher Learning (IHL) and industry partners.
SnFPC@DSI focuses on developing state-of-the-art process capabilities in the following areas:
1. Magnetic Storage (Hard-Disk Drive Technology) – Full fabrication and characterization capabilities to support research activities in Magnetic Media, Slider, Head-Disk Interface and Systems. A dedicated clean room facility housing a production-grade media sputtering tool (Intevac 200Lean GenII) is located at the DSI Hard Disk Media R&D Center at Ayer Rajah Crescent.
2. Solid-state Memory (STT-MRAM, RRAM) – A full range of silicon wafer processing tools are available to support 100 mm and 200 mm back-end-of-line (BEOL) processes and device integration projects, allowing DSI to prototype new materials and devices, and perform back-end integration on CMOS wafers from partner foundries.
3. Advanced Concepts and Nanotechnology – Newly installed nanofabrication, processing and characterization tools in DSI’s new cleanroom facility are capable of supporting III-V semiconductor processing and nanophotonic integration for up to 200 mm wafer sizes, for the fabrication of semiconductor lasers, waveguides, and various passive and active photonic integration devices.
4. For more information about DSI’s technology capabilities in photonic integration and non-volatile memory (NVM) integration, please refer to the SnFPC@DSI brochure here.